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Thin Film Processes
Thin Film Processes
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Remarkable advances have been made in recent years in the science and technology of thin film processes for deposition and etching. It is the purpose of this book to bring together tutorial reviews of selected filmdeposition and etching processes from a process viewpoint. Emphasis is placed on the practical use of the processes to provide working guidelines for their implementation, a guide to the literature, and an overview of each process. ISBN13: 9780127282503 ISBN10: 0127282505 Material Type: hardcover
Description
Description
Remarkable advances have been made in recent years in the science and technology of thin film processes for deposition and etching. It is the purpose of this book to bring together tutorial reviews of selected filmdeposition and etching processes from a process viewpoint. Emphasis is placed on the practical use of the processes to provide working guidelines for their implementation, a guide to the literature, and an overview of each process., ISBN13: 9780127282503 ISBN10: 0127282505 Material Type: hardcover
Product Details
Product Details
ISBN10: 0127282505
ISBN13: 9780127282503
Publisher: John L. Vossen,Werner Kern
Print Length: 564
Authors
Authors
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